micromechanical polysilicon gear train Technical Publications

Leslie Field, Ph.D.

CONFERENCE PAPERS AND SHORT COURSE PRESENTATIONS

  1. "Production-Ready Silicon Microvalve", Wang, T. K., Barth, P. W., Alley, R., Baker, J., Field, L. A., Gordon, G., SPIE's 1999 Symposium and Continuing Education Program on Micromachining and Microfabrication, Santa Clara, CA, September 1999.
  2. "A Silicon Microsuspension for Disk Drive Applications", Narbutovskih, Martha, Field, Leslie, Clifford, George, Henze, Richard, Burriesci, Diane, Williams, Judith, and Beck, Patricia, Transducers '97: Ninth International Conference on Solid-State Sensors and Actuators, Chicago, Illinois, June 1997.
  3. "Controlled Unit Processes for Silicon Micromachining," Field, Leslie A., Electrochemical Society Fall Meeting (invited paper), Chicago, Illinois, October, 1995.
  4. "Micromachined 1x2 Optical Fiber Switch", Field, Leslie A., Burriesci, Diane L., Robrish, Peter R., and Ruby, Richard C., Transducers '95: 8th International Conference on Solid-State Sensors and Actuators, Stockholm, Sweden, June 1995.
  5. "A Robust Normally-Closed Silicon Microvalve", Barth, Phillip W., Beatty, Christopher C., Field, Leslie A., Baker, James W., and Gordon, Gary B., Solid-State Sensor and Actuator Workshop, Technical Digest, Hilton Head Island, South Carolina, June 1994.
  6. Lecturer, "Mechanical Properties and Micromechanical Applications" as part of UC Extension short course, Polycrystalline-Silicon Technology and Applications, run by Theodore I. Kamins, San Francisco Airport, May 1992.
  7. "Fluid Actuation of Microgears", Field, Leslie A., White, Richard M. and Pisano, Albert P., American Society of Mechanical Engineers 1991 Winter Annual Meeting (Session on Fundamentals of Micro Heat and Mass Transfer), Atlanta, Georgia, December 1991.
  8. "Fluid-Powered Rotary Gears and Micro-Flow Channels", Field, Leslie A., White, Richard M. and Pisano, Albert P., Transducers '91: 6th International Conference on Solid-State Sensors and Actuators, Digest of Technical Papers, San Francisco, California, June 1991.
  9. "Fusing Silicon Wafers with Low-Melting-Temperature Glass", Field, Leslie A. and Muller, Richard S., Transducers '89: 5th International Conference on Solid-State Sensors and Actuators, Montreux, Switzerland, June 1989.
  10. "Low-Temperature Silicon-Silicon Bonding With Oxides", Field, Leslie A. and Muller, Richard S., 171st Meeting of the Electrochemical Society, Philadelphia, Pennsylvania, May 1987.

JOURNAL PUBLICATIONS

  1. "A Silicon Microsuspension for Disk Drive Applications", Narbutovskih, M., Field, L., Clifford, G., Henze, R., Burriesci, D., Williams-Brake, J., and Beck, P., Sensors and Actuators A 70/1-2, pp. 128-134, 1998.
  2. "Micromachined 1x2 Optical Fiber Switch", Field, Leslie A., Burriesci, Diane L., Robrish, Peter R., and Ruby, Richard C., Sensors and Actuators, vol. A, no. 53, pp. 311-315, 1996. Also reprinted in SPIE Milestones series volume, "Selected Papers on Optical MEMS", volume #MS153, Victor M. Bright, ed., 1999.
  3. "Fusing Silicon Wafers with Low-Melting-Temperature Glass", Field, Leslie A. and Muller, Richard S., Sensors and Actuators, vol. A, no. 23, pp. 935-938, 1990. Also reprinted in IEEE volume "Micromechanics and MEMS: Classic and Seminal Papers to 1990", William S. Trimmer, ed., 1996.
  4. "Surface Properties and Reactions of Coal Part 2", Field, L. A., Papadopoulos, A. J., and Wang, R. D., School of Chemical Engineering Practice, Massachusetts Institute of Technology, Cambridge, Massachusetts, Report 1978 ORNL/MIT - 270.